对MIMO精度运动阶段的脱矩阵的数据驱动校准.
Kaixin Liu1, Yang Liu2, Fazhi Song2
1Department of Control Science and Engineering, Harbin Institute of Technology, Harbin, 15001, China.
ISA transactions
|May 24, 2024
概括
本研究提出了一种数据驱动的方法,用于校准运动控制系统中的解矩阵. 该方法通过最小化轴相互作用和有效处理测量噪声来提高系统性能.
科学领域:
- 控制系统工程 控制系统工程
- 机器人和自动化 机器人和自动化
背景情况:
- 分离控制对于高精度的多输入多输出 (MIMO) 运动控制至关重要.
- 静态解矩阵,通常来自几何结构,可能会遭受不准确导致性能降低.
- 寻求在线校准方法来完善脱矩阵,而无需系统停机时间.
研究的目的:
- 在MIMO和线性时间不变 (LTI) 系统中进行静态解矩阵校准的数据驱动方法.
- 通过减轻由不精确脱矩阵引起的轴相互作用来提高系统性能.
- 为了解决测量噪声对校准过程的影响.
主要方法:
- 为静态解矩阵开发数据驱动的在线校准算法.
- 基于合理假设的校准静态解矩阵的推导.
- 引入仪表变量方法以抵消测量噪声的影响.
- 通过数值模拟和实验测试在超精密晶圆阶段进行验证.
主要成果:
- 拟议的数据驱动方法有效校准了MIMO和LTI系统的静态解矩阵.
- 校准矩阵通过减少轴合来显著提高系统性能.
- 仪表变量方法证明了对测量噪声的稳定性,确保了方法的一致性.
- 实验结果证实了开发的校准技术的实际有效性.
结论:
- 数据驱动的在线校准方法为提高MIMO运动控制精度提供了实用解决方案.
- 精确的解矩阵校准对于减轻轴相互作用和提高系统性能至关重要.
- 该方法对测量噪声的弹性使其适合于现实世界的应用,因为它在超精密晶圆阶段得到了验证.
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