沉积压力和温度对用于相变开关应用的薄膜加热器的影响
Sheng Qu1,2, Jihua Zhang1,2, Libin Gao1,2
1School of Integrated Circuit Science and Engineering, University of Electronic Science and Technology of China, Chengdu 610054, China.
Micromachines
|May 25, 2024
概括
优化的 (W) 微热器在射频相变开关中表现出增强的性能. 沉积参数进行调整,以实现纯的α相W膜,显著提高微热器电压耐受性和设备可靠性.
科学领域:
- 材料科学 材料科学 材料科学
- 电气工程 电气工程
- 物理 物理学 物理
背景情况:
- (W) 薄膜对于微热器应用至关重要,因为它们具有高点,稳定的温度电阻系数 (TCR) 和半导体工艺兼容性.
- 优化W薄膜沉积是提高先进电子设备中微热器性能和可靠性的关键.
研究的目的:
- 调查膜沉积参数,以优化微型加热器的性能.
- 制造和评估用于射频相变开关 (RFPCS) 的增强型微热器.
主要方法:
- 在不同的温度和压力下沉积膜,以分析它们对TCR和晶体相的影响.
- 优化W薄膜作为RFPCS设备中的微加热器被集成.
- 设备性能,包括执行电压,开关速度和循环稳定性,使用电气测量和拉曼光谱学进行了表征.
主要成果:
- 发现沉积温度和压力会影响W膜的TCR (正或负) 和晶体相 (alpha或混合β).
- 在650°C和1Pa压力下沉积的W薄膜产生了正的TCR和纯的α相结构.
- 优化的W微型加热器在最大电压耐受性上表现出>48%的增加,并使RFPCS的成功启动成为可能.
- 优化的设备实现了高 (MΩ) 和低 (138 Ω) 电阻状态之间的可靠切换,具有特定的电压脉冲,并承受了500个周期的无故障.
结论:
- 优化W薄膜沉积对于制造高性能微热器至关重要.
- 改进的微型加热器显著提高了射频相变开关的操作参数和可靠性.
- 这项工作为开发用于射频应用的强大和高效的微电子元件提供了途径.
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