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设计和测试一个符合ZTTΘ的位置调整系统与混合放大

Zhishen Liao¹, Zhihang Lin¹, Hui Tang²

¹State Key Laboratory of Precision Electronic Manufacturing Technology and Equipment, Guangdong University of Technology, Guangzhou 510006, China.

|May 25, 2024

概括

本研究介绍了一种新的四度自由度空间姿势调整系统 (SPAS),用于高精度定位. 开发的系统表现出卓越的精度,使其适合精密加工和微纳米操纵任务.

科学领域:

机械工程机械工程
精密工程精密工程是指精密的工程.
机器人技术机器人技术机器人技术

背景情况:

实现高精度的空间姿势调整对于先进的制造和操纵至关重要.
现有系统经常面临合,刚性和冲击范围的挑战.

研究的目的:

设计,分析和原型一个四度自由度 (4-DoFs) 的空间姿势调整系统 (SPAS).
在Z/Tip/Tilt/Θ (ZTTΘ) 方向实现高精度定位,并具有低合和高刚度.

主要方法:

集成压电驱动放大器与桥杆混合动力,双四条导向器和多层杆对称旋转机制.
分析建模和有限元分析用于几何参数优化.
原型制造和性能测试,包括MIMO系统的闭环脱控制实验.

主要成果:

该系统实现了327.37微米的Z方向微冲动和分别为3.462mrad和12.684mrad的曲折/旋转角度.
运动放大比率达到7.43X和Y轴.
经过证明的高定位精度:±100 nm (Z方向),±2 μrad (X/Y曲率) 和±25 μrad (Z旋转).

结论:

ZTTΘ机制的设计是可行的,并为精密应用提供了显著的优势.
开发的SPAS显示了精密加工和微纳米操纵任务的巨大潜力.

关键词:

弹性链链链微/纳米调整的调整.精密操作操作操作的精确性空间姿势空间姿势

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