在振动应力下对MEMS陀螺仪转子参数的建模和可靠性分析
Lei Wang1,2, Yuehong Pan2, Kai Li3
1School of Mechano-Electronic Engineering, Xidian University, Xi'an 710068, China.
Micromachines
|May 25, 2024
概括
振动会降低微电机系统 (MEMS) 陀螺仪的参数,如零偏差和尺度因子. 这项研究引入了一种可靠性评估方法来评估这种退化,提高MEMS陀螺仪的性能.
科学领域:
- 工程 工程师 工程师 工程师
- 材料科学 材料科学 材料科学
- 物理 物理学 物理
背景情况:
- 振动环境可能会对微电机系统 (MEMS) 陀螺仪旋转器参数产生负面影响.
- 关键参数如零偏差和尺度因子的退化会影响MEMS陀螺仪的性能和可靠性.
- 对振动下参数降解的准确评估对于有效使用MEMS陀螺仪至关重要.
研究的目的:
- 引入一种用于评估MEMS陀螺仪旋转子参数在振动下退化的可靠性的新方法.
- 分析振动对MEMS陀螺仪转子参数的影响,特别是零偏差和尺度因子.
- 开发一种定量方法来评估MEMS陀螺仪在动态环境中的可靠性.
主要方法:
- 分析MEMS陀螺旋转子的工作原理和振动诱导的参数变化.
- 使用分布式假设方法开发加速降解模型.
- 应用Copula函数用于对零偏差和振动下尺度因子的可靠性评估.
主要成果:
- 实验数据证实,增加的振动应力减少了故障时间,并增加了MEMS陀螺仪的故障率.
- 在振动下的零偏差参数中观察到显著的退化.
- 开发的评估方法有效地描述了规模因子可靠性的变化和随着时间的推移的零偏差.
结论:
- 建议的可靠性评估方法为MEMS陀螺仪在振动下的性能提供了宝贵的见解.
- 了解参数退化是提高MEMS陀螺仪实际应用和寿命的关键.
- 这项研究为评估和预测MEMS陀螺仪在振动环境中的可靠性提供了一个强大的框架.
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