压缩应力对铜结合质量的影响以及先进包装中的结合机制
Tsan-Feng Lu1, Ping-Yang Lee1, YewChung Sermon Wu1
1Department of Materials Science and Engineering, National Yang Ming Chiao Tung University, Hsinchu 30010, Taiwan.
Materials (Basel, Switzerland)
|May 25, 2024
概括
压缩应力通过增加结合分数和减少空隙来增强铜与二氧化的结合. 这种效应对于设计强大的铜接头至关重要,特别是在高温下.
科学领域:
- 材料科学 材料科学 材料科学
- 表面科学是一门学科.
- 机械工程 机械工程
背景情况:
- 铜 (Cu) 和二氧化 (SiO2) 混合接头在微电子和先进包装中至关重要.
- 和SiO2之间的热膨胀不匹配会导致界面应力,影响粘合质量.
- 了解压力下的界面机制对于可靠的关节性能至关重要.
研究的目的:
- 研究压力应力对Cu/SiO2混合接头的粘合质量和机制的影响.
- 量化不同压力压力水平对高温界面空隙演变的影响.
- 阐明Cu薄膜变形在粘合过程中的作用.
主要方法:
- 在Cu/SiO2接口上引入人工空洞.
- 使用聚焦离子束 (FIB) 观测空洞演变.
- 结合分数和空隙分数的量化.
- 使用表面扩散爬行模型进行实验验证.
主要成果:
- 增加的压力应力导致Cu/SiO2接口的结合分数较高,空隙分数减少.
- 观察和量化了界面上的空洞演变.
- 膜变形 (爬行/弹性) 随着压力应激水平的提高而增加.
- 实验结果与表面扩散爬行模型的预测保持一致.
结论:
- 压缩应力通过促进Cu-Cu粘合,显著提高了Cu/SiO2接口的粘合质量.
- 高温 (250°C和300°C) 与压力应激相结合,影响空洞的进化和结合.
- 工艺设计必须考虑深度和施加的应力,以优化Cu关节的完整性.
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