2. . β-Ga2O3EFG,

Ganrong Feng1,2, Shan Li1,2, Yawen Tian2

  • 1College of Integrated Circuit Science and Engineering & National and Local Joint Engineering Laboratory for RF Integration and Micro-Packing Technologies, Nanjing University of Posts and Telecommunications, Nanjing 210023, China.

ACS omega
|May 27, 2024
PubMed
概括

高品质的2英寸β-氧化物 (β-Ga2O3) 单晶使用边界定义的膜养生长方法生长. 综合性表征证实了它们作为先进电子和光子设备的基板的适用性.