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Updated: Jun 25, 2025

Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters

Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters

Published on: February 4, 2018

一种自动Q因子匹配方法,可以消除MEMS振动陀螺仪在速率模式下77%的ZRO

Jingbo Ren¹, Tong Zhou¹, Yi Zhou¹

¹School of Mechanical Engineering, Nanjing University of Science and Technology, Nanjing, 210000 China.

Microsystems & nanoengineering

|May 27, 2024

概括

本研究提出了一种用于实时识别和自动匹配退化的微电机系统 (MEMS) 陀螺仪中的质量因子 (Q-因子) 的新方法. 这种技术显著降低了零速率输出 (ZRO),并改善了MEMS陀螺仪的偏差不稳定性.

科学领域:

微电机系统 (MEMS) 是指微电机系统.
振动陀螺仪振动陀螺仪是一种振动陀螺仪.
传感器技术传感器技术

背景情况:

不匹配的质量因子 (Q-因子) 是退化 (DE) 微电机系统 (MEMS) 振动陀螺仪中零速率输出 (ZRO) 的主要原因.
现有的方法难以实时解决Q因子不匹配问题,限制了陀螺仪的性能.

研究的目的:

引入一种实时识别和自动匹配DE MEMS振动陀螺仪在速率模式下运行的Q因子的方法.
为了减轻Q因子不匹配对陀螺仪准确性和稳定性的影响.

主要方法:

开发了基于振动特征的在线测试方法来确定驱动和感觉模式的Q因子.
设计了一种自动Q因子匹配系统,利用电阻阻尼器的机械热散热机制.
通过模拟和实验在MEMS磁盘共振器陀螺仪 (DRG) 上验证了方法.

主要成果:

在Q-因子识别中达到4%的测量误差.
通过自动Q因子匹配,ZRO降低了77%.
减少了MEMS DRG中的ZRO,从0.11°/s降低到0.025°/s.
改进了偏差不稳定性 (BI) 从0.40°/s到0.19°/s.

结论:

拟议的方法有效地识别和匹配DE MEMS陀螺仪的实时Q因子.
自动Q因子匹配可显著降低ZRO,并提高MEMS陀螺仪的偏差稳定性.
这种技术为提高MEMS振动陀螺仪的性能提供了实用解决方案.

关键词:

电气和电子工程电气和电子工程传感器传感器传感器

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