一个低噪声容量对电压读出电路的低噪声容量,基于微型陀螺的活性反电荷敏感放大器
Yinyu Liu1,2, Ke Gu1, Xin Liu1
1Institute of Electronic Engineering, China Academy of Engineering Physics, Mianyang 621999, China.
The Review of scientific instruments
|June 3, 2024
概括
基于电荷敏感放大器 (CSA) 的电容-电压 (C-V) 读出电路提供优越的噪声性能和较小的面积,与跨阻抗放大器 (TIA) 电路相比. 这种CSA设计非常适合微陀螺仪集成.
科学领域:
- 电气工程 电气工程
- 微电子机械系统 (MEMS) 是一种微电子机械系统.
背景情况:
- 电容电压 (C-V) 读出电路对于微型机械化陀螺仪至关重要.
- 基于跨阻抗放大器 (TIA) 的电路因高值反电阻而遭受热噪声.
研究的目的:
- 分析和比较TIA和基于充电敏感放大器 (CSA) 的C-V读出电路的噪声性能.
- 设计和评估基于CSA的微陀螺仪的新型C-V读出电路.
主要方法:
- 理论分析和模拟TIA和CSA噪声性能.
- 基于CSA的C-V读出电路的设计和制造,使用180nm CMOS技术.
- 实验测试C-V增强,输出噪声和分辨率.
主要成果:
- 在TIA电路中反电阻的热噪声主导了输出噪声.
- 设计的CSA电路实现了225dB的C-V增益,输出噪声低于150nV/Hz.
- 制造的芯片显示了在1V偏差电压下840zF/Hz的分辨率.
结论:
- 基于CSA的C-V读出电路克服了TIA电路的噪声限制.
- 设计的CSA电路在噪声性能和面积方面提供了显著的优势,使其适合微陀螺仪集成.
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