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在圆形的镜子外上检测软X射线波面

Christoph Braig¹, Jürgen Probst², Heike Löchel²

¹Institute of Applied Photonics e.V., Rudower Chaussee 29/31, 12489 Berlin, Germany.

Journal of synchrotron radiation

|June 6, 2024

概括

一种新的现场方法使用X射线波面传感来描述光学元件. 这种技术准确地测量波面误差,以改善X射线镜面对齐和校正器设计.

科学领域:

光学和X射线科学视觉和X射线科学
计量学和仪器仪表技术

背景情况:

在柔软的X射线领域描述旋转对称的光学元件需要可靠的现场方法.
精确的波纹传感对于高分辨率的X射线科学应用至关重要.

研究的目的:

开发和报告一项用于软X射线光学的新型现场波浪前线传感技术.
为了能够精确地描述像圆形镜子外这样的光学元素.
为了促进X射线镜子的改进对齐和波面校正器的设计.

主要方法:

用微型,电子激发的光源 (碳Kα) 对镜像样本进行辐射.
使用CCD摄像机在焦点附近的两个位置记录3D强度分布.
实现基于强度传输方程的射线追踪代码,从强度梯度中检索相位.

主要成果:

用RMS获得的波面错误图. 的值为 ±10.9λ0 ,峰值到谷值为 ±31.3λ0.0 .
重建的焦点直径为38.4μm,与实验观测 (39.4μm FWHM) 密切匹配.
圆形图形和斜率误差的表征为±1.14μm和±8.8弧秒 (r.m.s. ),分别是 () 和 ().

结论:

在现场开发的方法在软X射线领域提供了可靠的波面传感.
该技术能够准确地描述光学元件的误差和焦点属性.
这些发现支持精确对准X射线镜子,并为先进的X射线科学设计波面校正器.

关键词:

的X射线光学.圆形镜子的镜子是圆形的重点重建重建重建的重点倾斜误差倾斜误差倾斜误差倾斜误差倾斜误差倾斜误差表面表征表征的表征表征.波浪前线传感波浪前线传感

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