概括
我们开发了一种可重新配置的光子共振器,使用深波导和可调的多模干扰仪 (MMI). 该设备作为在绝缘体 (SOI) 平台的高性能过器或波长独立延迟线.
科学领域:
- 光子学 是一个光子学.
- 集成电路 集成电路
- 材料科学 材料科学 材料科学
背景情况:
- 3μm厚的在绝缘体 (SOI) 平台对于集成光子学至关重要.
- 响应器集成对设备性能和制造耐受性提出了挑战.
研究的目的:
- 提出和演示具有高制造容忍度和可重配置性的集成共振器.
- 为3μm厚的SOI光子平台扩展设备库.
主要方法:
- 使用深度蚀刻的波导用于共振器制造.
- 使用可调节的多模干扰仪 (MMI) 来实现基于合器的重新配置.
- 在关键合 (过器) 和极端超合 (延迟线) 状态下,设备性能的特征.
主要成果:
- 在1530-1570nm范围内,实现了波器运行,灭光率 (ER) 为23.5dB,质量系数 (Q) 为3.1×105.
- 演示了一个带宽很大的延迟线,连续延迟时间变化为22ps,几乎独立于波长.
- 共振器具有很高的制造耐受性和可重新配置性.
结论:
- 拟议的集成共振器增强了3μm厚的SOI平台的能力.
- 该设备提供了多功能功能,包括过器和延迟线.
- 这项工作丰富了光子学的应用潜力.
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