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在芯片上的高增益螺旋Al2O3波导放大器:Er3+波导放大器
Optics express
|June 11, 2024
概括
研究人员开发了先进的氧化 (Al2O3) 波导放大器,添加了 (Er3+),实现了创纪录的光学增益. 这些放大器对可扩展的集成光子学应用具有显著的前景.
科学领域:
- 材料科学 材料科学 材料科学
- 光电学是指光电子产品.
- 光子学是指光子学的使用方法.
背景情况:
- 集成光子学需要高效的芯片内光学放大器.
- 氧化 (Al2O3) 为稀土兴奋剂提供了一个有前途的宿主材料.
- (Er3+) 是电信C频段光学放大功能的关键剂.
研究的目的:
- 为了展示高收益的Al2O3:Er3+波导放大器.
- 为了研究这些放大器对集成光子电路的性能.
- 在Al2O3:Er3+系统中为芯片上净收益建立一个新的基准.
主要方法:
- 对于Al2O3:Er3+膜沉积的反应性喷雾.
- 电子束光刻技术用于波导图案.
- 用于波导制造的反应性离子蚀刻.
- 用于提高性能的火.
- 在1480nm处进行双向抽,以获得光学增益.
主要成果:
- 在1532 nm时实现了超过30dB的小信号净增益.
- 在芯片上显示的输出功率为10.2-13.6 dBm.
- 使用了3.9 × 10^20离子/厘米^3.3的度.
- 打破了Al2O3:Er3+波导放大器芯片内部净增益的纪录.
结论:
- 开发的Al2O3:Er3+波导放大器代表了集成光子学的重大进步.
- 高增益和可扩展性在现有技术上提供了优势.
- 这些放大器适用于各种集成光子应用,需要高效的信号放大.
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