Al/InAs线,-,-

Joachim E Sestoft1, Mikelis Marnauza1, Dags Olsteins1

  • 1Center for Quantum Devices and Nano-science Center, Niels Bohr Institute, University of Copenhagen, 2100 Copenhagen, Denmark.

Nano letters
|June 12, 2024
PubMed
概括

我们开发了一种现场影像技术,用于制造混合半导体-超导体设备. 这种方法避免了蚀刻引起的表面粗,保持了电子的移动性,并使高质量的量子传输成为可能.

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