斯坦纳恩的高分辨率电子电离质谱:叠加碎片化模式的解卷
Joshua Rieger1, Thorsten Benter1, Hendrik Kersten1
1Department of Physical and Theoretical Chemistry, University of Wuppertal, Gaussstr. 20, 42119 Wuppertal, Germany.
Journal of the American Society for Mass Spectrometry
|June 12, 2024
概括
这项研究呈现了高分辨率的stannane质谱,这对于理解极端紫外线光刻画中的锡去除至关重要. 频谱有助于分析的形成和分解机制.
科学领域:
- 等离子体物理学的物理学
- 表面化学 表面化学
- 分析化学 分析化学
背景情况:
- 极端紫外线 (EUV) 刻画采用脉冲激光等离子体,导致锡滴蒸发和沉积.
- 表面结合的锡去除通常涉及等离子体,形成斯坦 (SnH4).
- 斯坦南的形成和分解的确切机制尚未完全理解.
研究的目的:
- 为了提供一个高分辨率,同位素特征的质谱 stannane的分析参考.
- 阐明斯坦南形成和分解的机制.
- 调查离子源参数对碎片形成的影响.
主要方法:
- 获得了stannane的高分辨率70 eV电子电离 (EI) 质谱.
- 在碎片分析中包括所有十种天然锡同位素.
- 使用RASP程序计算来自同位素叠加质量信号的碎片分布.
- 断片形成依赖于离子源压力和温度的确定.
主要成果:
- 创建了一个全面的,高分辨率的EI质谱的stannane,包括同位素分布.
- 拉斯普计划成功计算了相对碎片分布.
- 碎片形成对离子源压力和温度的依赖性被量化.
结论:
- 陈述的Stannane质谱是质谱分析的重要参考.
- 这项工作为了解EUV石版中的锡去除过程提供了关键数据.
- 这项研究提供了关于在EI条件下控制stanane行为的基本机制的见解.
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