堆叠纳米板晶体管的低温 (低至6K) 和量子运输特征,具有高K/金属门-最后的过程
Xiaohui Zhu1,2,3, Lei Cao1,2,3, Guilei Wang4
1Integrated Circuit Advanced Process R&D Center, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China.
Nanomaterials (Basel, Switzerland)
|June 13, 2024
概括
本研究探讨了下一代纳米板 (NS) FETs和鱼骨 FETs中的量子运输. 观察到增强的切换行为和量子弹道运输,为先进的量子计算设备铺平了道路.
科学领域:
- 量子计算硬件 量子计算硬件
- 先进的半导体设备物理学的物理.
背景情况:
- 在FinFET和纳米线晶体管中的量子点显示出量子计算的前景.
- 需要下一代晶体管架构来推进量子技术.
研究的目的:
- 为了研究堆纳米板 (NS) FETs和鱼骨FETs中的量子运输特征.
- 分析这些新晶体管结构的低温电气性能.
主要方法:
- 传输电子显微镜 (TEM) 用于结构分析.
- 低温电气测量低至6K.
- 量子运输现象的探索.
主要成果:
- 观察到增强的开关行为,在6K的状态外泄漏电流下降一级.
- 测量了值电压与温度的线性下降.
- 在更短的门长度和更低的温度下证实了量子弹道运输.
- 由于不对称的屏障,确定了额外的~1.3mV偏差.
- 鱼骨FETs表现出类似的特性,但由于SiGe通道而降解了量子传输.
结论:
- 堆纳米板FET表现出未来量子计算的有希望的量子传输特性.
- 通过调整通道几何和材料组成,可以优化鱼骨FET性能.
- 这些发现有助于开发基于的先进量子设备.
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