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Updated: Jun 24, 2025

Single-Digit Nanometer Electron-Beam Lithography with an Aberration-Corrected Scanning Transmission Electron Microscope
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Single-Digit Nanometer Electron-Beam Lithography with an Aberration-Corrected Scanning Transmission Electron Microscope

Published on: September 14, 2018

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高通量微组合TEM相位映射直流磁铁子喷射YxTi1-xOy薄层系统的高通量微组合TEM相位映射

Dániel Olasz1,2, Viktória Kis1,3, Ildikó Cora1

  • 1Institute for Technical Physics and Materials Science, HUN-REN Centre for Energy Research, Konkoly-Thege Miklós út 29-33, 1121 Budapest, Hungary.

Nanomaterials (Basel, Switzerland)
|June 13, 2024
PubMed
概括

高通量方法加速了材料科学发现. 这项研究使用微组合技术进行全面的Y-Ti-O薄膜表征,揭示相位形成图.

关键词:
这就是TEMEM.在 Y-Ti-O 薄膜上.这是一个微组合的微组合器.阶段地图 阶段地图焦化的结构是火化.反应式直流喷雾是什么意思

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Author Spotlight: A Machine-Vision Approach to Transmission Electron Microscopy Workflows, Results Analysis and Data Management10:23

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相关概念视频

Transmission Electron Microscopy01:15

Transmission Electron Microscopy

In 1931, physicist Ernst Ruska—building on the idea that magnetic fields can direct an electron beam just as lenses can direct a beam of light in an optical microscope—developed the first prototype of the electron microscope. This development led to the development of the field of electron microscopy. In the transmission electron microscope (TEM), electrons are produced by a hot tungsten element and accelerated by a potential difference in an electron gun, which gives them up to 400...
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