没有直流的方法来评估纳米级等效氧化物厚度:暗模式扫描电容显微镜

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Updated: May 11, 2026

Scanning-probe Single-electron Capacitance Spectroscopy
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Scanning-probe Single-electron Capacitance Spectroscopy

Published on: July 30, 2013

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Mao-Nan Chang1, Yi-Shan Wu2, Chiao-Jung Lin2

  • 1Department of Physics, National Chung Hsing University, Taichung 402, Taiwan.

Nanomaterials (Basel, Switzerland)
|June 13, 2024
PubMed
概括

一种使用暗模式扫描电容显微镜 (DM-SCM) 的新型无直流技术准确地测量了热氧化物和高k氧化物的等效氧化物厚度 (EOT). 这种方法提供了精确的EOT评估和成像,克服了传统电容电压 (C-V) 方法的局限性.

关键词:
电流应力 DC 应力 DC 应力相当于氧化物厚度的氧化物高清高清高清高清绘制地图,绘制地图.扫描电容显微镜扫描电容显微镜

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