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相关概念视频

Steady Flow of a Fluid Stream01:27

Steady Flow of a Fluid Stream

Consider a control volume, such as a pipe with solid boundaries, through which fluid flows and changes direction due to the impulse exerted by the resulting force from the pipe walls. In steady flow, the mass of fluid entering the control volume at a given time, t, with velocity v1, is equal to the mass leaving after infinitesimal time dt, with velocity v2.
During this process, the momentum of the fluid within the control volume remains constant over the time interval dt. By applying the...
Conservation of Mass in Moving, Nondeforming Control Volume01:14

Conservation of Mass in Moving, Nondeforming Control Volume

Stormwater detention basins are essential in managing runoff during heavy rainfall, particularly in urban areas where impervious surfaces increase the risk of flooding. Understanding the conservation of mass in these systems allows engineers to optimize basin performance, balancing inflow, outflow, and water storage.
In the context of a detention basin, the conservation of mass states that the total mass of water entering the basin must equal the mass leaving the basin plus any accumulation of...
Typical Model Studies01:30

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Fluid mechanics model studies often utilize scaled-down systems to predict fluid behavior in full-scale environments, such as river flows, dam spillways, and structures interacting with open surfaces. Maintaining Froude number similarity in river models is crucial, as it replicates surface flow features like wave patterns and velocities.
Design Example: Creating a Hydraulic Model of a Dam Spillway01:21

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Scaled hydraulic models of dam spillways provide a practical way to replicate and study the intricate flow dynamics of these structures. Often built to a 1:15 ratio, these models allow for observing critical water behavior, such as velocity distribution, flow patterns, and energy dissipation.
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Gradually varying flow (GVF) in open channels describes situations where water depth changes slowly along the channel due to factors like non-uniform bed slope, channel shape variations, or obstructions. This flow type occurs when the depth adjusts gradually to balance gravitational forces, shear forces, and energy requirements, resulting in a low rate of depth change.Characteristics of Gradually Varying FlowGVF is commonly observed in natural streams, rivers, and canals, where flow depth...
Rapidly Varying Flow01:24

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Rapidly varying flow (RVF) in open channels is characterized by abrupt changes in flow depth over a short distance, with the rate of depth change relative to distance often approaching unity. These flows are inherently complex due to their transient and multi-dimensional nature, making exact analysis difficult. However, approximate solutions using simplified models provide valuable insights into their behavior.Key Features of Rapidly Varying FlowRVF is commonly observed in scenarios involving...

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没有直流的方法来评估纳米级等效氧化物厚度:暗模式扫描电容显微镜.

Mao-Nan Chang1, Yi-Shan Wu2, Chiao-Jung Lin2

  • 1Department of Physics, National Chung Hsing University, Taichung 402, Taiwan.

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概括

一种使用暗模式扫描电容显微镜 (DM-SCM) 的新型无直流技术准确地测量了热氧化物和高k氧化物的等效氧化物厚度 (EOT). 这种方法提供了精确的EOT评估和成像,克服了传统电容电压 (C-V) 方法的局限性.

关键词:
电流应力 DC 应力 DC 应力相当于氧化物厚度的氧化物高清高清高清高清绘制地图,绘制地图.扫描电容显微镜扫描电容显微镜

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科学领域:

  • 材料科学 材料科学 材料科学
  • 电气工程 电气工程
  • 纳米技术纳米技术

背景情况:

  • 对于等效氧化物厚度 (EOT) 评估的传统电容电压 (C-V) 方法需要大型电极和直流电压扫描,可能会影响测量.
  • 准确的EOT确定对于先进的半导体设备表征和可靠性评估至关重要.

研究的目的:

  • 开发和验证一种新的无直流技术,用于使用暗模式扫描电容显微镜 (DM-SCM) 评估和成像等效氧化物厚度 (EOT).
  • 为了证明DM-SCM在热和高k氧化物薄膜上进行精确的EOT测量的能力.
  • 为了可视化EOT变化,包括由直流应力引起的变化.

主要方法:

  • 开发使用小面积接触电极 (DM-SCM) 的无直流扫描电容显微镜 (SCM) 技术.
  • 使用热氧化物膜作为校准参考,建立SCM信号比率和EOT比率之间的线性关系.
  • 对DM-SCM与常规C-V方法对EOT在90kHz至1MHz的频率范围内进行实验验证.

主要成果:

  • DM-SCM实现了对热性和高k氧化物的精确EOT评估,低至几纳米.
  • 实验结果显示,对于热氧化物,DM-SCM和C-V方法之间有很好的一致性,EOT差异低于0.5%.
  • DM-SCM成功生成了EOT图像,可视化了DC压力诱导的电荷捕获的变化和影响.

结论:

  • 拟议的无直流DM-SCM技术为EOT评估提供了可靠和准确的替代方案,特别是对于薄氧化物层.
  • 通过消除直流电压效应并实现空间EOT映射,DM-SCM比传统的C-V方法具有优势.
  • 该技术增强了半导体氧化物的特征,为材料均性和应力诱导的降解提供了洞察力.