线性化干扰度显微镜的垂直尺度及其对阶梯高度测量的影响
Thomas A Germer1, T Brian Renegar1, Ulf Griesmann1
1Sensor Science Division, National Institute of Standards and Technology, Gaithersburg, Maryland 20899 USA.
概括
这项研究提出了一种新的校准方法,用于干扰度显微镜中垂直尺度的校准方法. 该技术提高了表面地形测量精度和可追溯到国际单位系统 (SI) 的可追溯性.
科学领域:
- 计量学 计量学 计量学
- 光学工程是指光学工程.
- 表面科学是一门学科.
背景情况:
- 准确的垂直尺度校准对于可追溯的表面地形测量至关重要.
- 干涉计显微镜的现有方法在完全垂直扫描运动校准方面存在局限性.
研究的目的:
- 为连贯扫描干扰度显微镜的整个垂直扫描运动开发一个校准程序.
- 为了确定表面地形测量的可追溯性到SI单位的长度,米.
主要方法:
- 使用了平面镜像工件,光谱过器和光圈.
- 通过调整显微镜头高度,在扫描范围内改变干扰图的中心.
- 确定局部干扰图频率,通过适应状函数.
主要成果:
- 开发了一种方法来产生整个垂直扫描运动的响应曲线.
- 在垂直扫描运动中的量化非线性,使得测量不确定性的估计.
- 证明,对非线性进行校正,将步骤高度测量的可复制性提高了三倍.
结论:
- 描述的校准程序对于连贯扫描干扰度显微镜是有效的.
- 该方法提高了表面地形测量的准确性和可靠性.
- 对扫描运动非线性进行校正,显著提高了测量可重复性.
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