一个量子感应计量学用于磁性记忆
Vicent J Borràs1, Robert Carpenter2, Liza Žaper1,3
1Qnami AG, Muttenz, Switzerland.
概括
扫描NV磁力测量 (SNVM) 能够对磁性随机访问存储器 (MRAM) 进行单位分析,揭示关键的磁性特性并提高制造统一性. 这种量子传感技术可以识别性能不佳的比特,以进行增强的故障分析.
科学领域:
- 材料科学 材料科学 材料科学
- 量子技术 量子技术是一种量子技术.
- 半导体物理 半导体物理
背景情况:
- 磁性随机访问存储器 (MRAM) 是一个关键的新兴非易失性存储器技术.
- 控制设备属性分布对于MRAM进步和新应用至关重要.
- 目前的计量方法通常依赖于集体平均值,限制单个比特分析.
研究的目的:
- 引入一个非接触计量技术,用于单个MRAM位的特征.
- 通过扫描NV磁力测量 (SNVM) 来研究纳米级的MRAM性能.
- 为了评估比特对比特的统一性,并识别表现不佳的比特.
主要方法:
- 使用扫描NV磁力测量 (SNVM) 进行非接触性表征.
- 在单个MRAM位 (<60 nm) 上进行磁反转表征.
- 两种不同的比特蚀刻工艺在模式形成后进行了基准测试.
主要成果:
- 成功地从单个MRAM位中提取磁性,热稳定性和切换统计数据.
- 证明了测量位对位统一性的能力.
- 识别了阵列边缘的"尾部位",使得有针对性的故障分析成为可能,与集成方法不同.
结论:
- SNVM是一个强大的工具,用于纳米级的量子传感MRAM设备.
- 这种技术有助于在半导体生产线的早期选.
- 在行业中将SNVM集成为标准纳米尺度表征工具的潜力.
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