在低温下通过热噪声测量对qPlus传感器的刚度进行校准
Laurent Nony1, Sylvain Clair1, Daniel Uehli2
1Aix Marseille University, CNRS, IM2NP, UMR 7334, 13397 Marseille, France.
Beilstein journal of nanotechnology
|June 18, 2024
概括
精确的刚度校准对于在非接触式原子力显微镜 (nc-AFM) 中精确的力测量至关重要. 这项研究使用热噪声测量校准了一个qPlus传感器,在第一个曲模式下产生约2000N/m的刚度.
科学领域:
- 物理 物理学 物理
- 表面科学是一门学科.
- 纳米技术 纳米技术
背景情况:
- 无接触原子力显微镜 (nc-AFM) 可实现原子分辨率成像和力光谱.
- 在nc-AFM中精确的尖端样本力测量需要精确地了解探头刚度 (k).
- 现有的刚性校准方法往往缺乏足够的精度,用于高K探头.
研究的目的:
- 为了对 nc-AFM 的 qPlus 传感器进行准确的刚度校准.
- 为了研究尖端对传感器刚度的影响.
- 建立一种可靠的方法来校准高刚度,高质量的nc-AFM探头.
主要方法:
- 在9.8K的超高真空 (UHV) 中使用了热噪声测量.
- 采用了一个qPlus传感器,一种带着尖端的石英调音叉 (QTF).
- 结合数值模拟与实验数据分析的热噪声功率光谱密度.
主要成果:
- 估计qPlus传感器第一个屈曲固态的刚度大约为2000N/m,不确定性为10%.
- 在没有尖端的情况下确定传感器的静态刚度大约为3300N/m.
- 证明尖端显著影响测量的刚度,需要个别探头校准.
结论:
- 开发的热噪声测量和分析方法为高k,高Q nc-AFM探针提供了准确的刚度校准.
- 由于尖端依赖的刚度变化,qPlus传感器的个别校准是必不可少的.
- 该方法可适应其他nc-AFM探头,如悬臂和长度延伸共振器.
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