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循环误差对基于光学频率的绝对距离测量的影响
Runmin Li1, Haochen Tian2,3, Junkai Shi1
1Optoelectronic Technology Center, Institute of Microelectronics of the Chinese Academy of Sciences, Beijing 100029, China.
Sensors (Basel, Switzerland)
|June 19, 2024
概括
循环误差会影响使用光学频率 (OFC) 的绝对距离测量. 选择合适的参考路径长度可以最大限度地减少干扰测量的错误,从而提高测量线性.
科学领域:
- 计量学 计量学 计量学
- 光学工程是指光学工程.
- 精确度测量 精确度测量 精确度测量
背景情况:
- 光学频率 (OFC) 允许高精度的绝对距离测量,具有很大的非模糊范围 (NAR) 和高更新率.
- 循环误差是基于OFC的测量中的一个重大挑战,损害了线性和准确性.
研究的目的:
- 量化调查周期误差对使用OFC测距绝对距离测量的影响.
- 探索在合成波长干涉测量和单波长干涉测量中减轻周期误差的策略.
主要方法:
- 进行了数值计算来分析周期性错误效应.
- 结合了两种干扰测量技术:合成波长干扰测量和单波长干扰测量.
- 评估了参考路径长度和合成波长选择的影响.
主要成果:
- 确定一个合适的参考路径长度作为一个关键因素,在结合干扰测量方法时最大限度地减少循环误差.
- 提供了选择合成波长的建议,以平衡NAR和误差缓解.
- 该研究量化了周期性错误的影响,提供了对其减少的见解.
结论:
- 优化参考路径长度和合成波长选择对于准确的基于OFC的绝对距离测量至关重要.
- 这些发现适用于各种OFC应用,包括表面造型和振动分析.
- 这项研究为改善距离测量的线性性和可靠性提供了实际指导.
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