以钻石为基础的HBAR作为高压传感器
B P Sorokin1, N O Asafiev1, D A Ovsyannikov2
1Technological Institute for Superhard and Novel Carbon Materials, 108840 Moscow, Troitsk, Russian Federation; Moscow Institute of Physics and Technology, 141700 Dolgoprudny, Russian Federation.
一个与钻石芯 (DAC) 集成的新型高超音量批量声学共振器 (HBAR) 作为敏感的高压传感器. 这种声电子传感器表现出卓越的性能和灵敏度,用于高达30 GPa的压力测量.
科学领域:
- 材料科学 材料科学 材料科学
- 凝聚物质物理学 凝聚物质物理学
- 声学 声学 在声学方面
背景情况:
- 高压研究需要准确而敏感的测量工具.
- 现有的压力传感器在性能和灵敏度方面存在局限性.
- 高超音量批量声学共振器 (HBAR) 为新型传感应用提供了潜力.
研究的目的:
- 开发和评估使用HBAR作为高压传感器的集成测量系统.
- 为了研究在钻石细胞 (DAC) 中使用特定的HBAR配置的可行性.
- 使用已确定的高压校准方法校准HBAR传感器.
主要方法:
- 开发一个集成系统,结合DAC和HBAR,在微波频段 (1.33.7 GHz) 运行.
- 一个特定的HBAR配置的制造:"Al/ASN/Mo/100) 钻石".
- 使用两个独立的方法对HBAR传感器进行校准:钻石拉曼线移和红宝石R1发光线移.
主要成果:
- 在HBAR频率变化和施加压力 (030 GPa) 之间建立了稳定的相关性.
- 确定HBAR传感器的灵敏度为4.8 × 10−4 GPa−1.
- 与05GPa范围内的现有方法相比,开发的传感器表现出卓越的性能和灵敏度.
结论:
- 集成的HBAR-DAC系统是一个可行的和有效的高压传感器.
- 拟议的HBAR配置具有高灵敏度和稳定的性能.
- 这种声电子传感器为高压测量提供了显著的优势,特别是在较低的GPa范围内.
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