以钻石为基础的HBAR作为高压传感器

B P Sorokin1, N O Asafiev1, D A Ovsyannikov2

  • 1Technological Institute for Superhard and Novel Carbon Materials, 108840 Moscow, Troitsk, Russian Federation; Moscow Institute of Physics and Technology, 141700 Dolgoprudny, Russian Federation.

Ultrasonics
|June 19, 2024
PubMed
概括

一个与钻石芯 (DAC) 集成的新型高超音量批量声学共振器 (HBAR) 作为敏感的高压传感器. 这种声电子传感器表现出卓越的性能和灵敏度,用于高达30 GPa的压力测量.

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