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使用离子束计算创建的亚纳米质量的X射线镜.

Arindam Majhi1, Riley Shurvinton1, Paresh Chandra Pradhan1

  • 1Diamond Light Source, Harwell Science and Innovation Campus, Didcot OX11 0DE, United Kingdom.

Journal of synchrotron radiation
|June 21, 2024
PubMed
概括

离子束计算 (IBF) 的进步实现了高精度的X射线镜像校正. 这种技术的光学质量与高端商业光学相美,适用于严苛的科学应用.

关键词:
的X射线光学.确定性计算的计算方法高度错误和斜率错误的错误离子束测量 (IBF) 是一种光学是使用光学.

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科学领域:

  • 材料科学 材料科学 材料科学
  • 光学和光子学 在光学和光子学.
  • 表面计量学 表面计量学

背景情况:

  • 高精度的图形校正对于先进的X射线光学至关重要.
  • 离子束计量 (IBF) 提供了一个精确的方法,用于表面计量和镜子精细化.

研究的目的:

  • 介绍一个离子束计量仪器的技术进步.
  • 通过对X射线镜子的实验结果来证明IBF系统的功能.

主要方法:

  • 使用了一种开发的IBF系统,配备120mm网格离子源,四轴运动阶段和车载激光光斑计.
  • 处理了两个X射线镜,用于1D和2D图形校正.

主要成果:

  • 实现了0.08纳米的RMSS. 高度误差和44 nrad r.m.s. 的情况. 对于1D校正的斜率错误.
  • 获得了0.8纳米的r.m.s. 高度误差和230 nrad r.m.s. 的时间. 在67mm x 17mm光圈上进行二维校正时的斜率误差.
  • 一维校正结果与最高级别的商业X射线光学相提并论.

结论:

  • 钻石光源的先进IBF仪器使得X射线镜的高精度图形校正成为可能.
  • 展示的性能符合最先进的X射线光学技术的严格要求.