一个新的深沟超结SiC MOSFET,具有改进的特定电阻
Rongyao Ma1,2, Ruoyu Wang1, Hao Fang2
1School of Microelectronics and Communication Engineering, Chongqing University, Chongqing 400044, China.
Micromachines
|June 27, 2024
概括
一个新的4H-SiC深沟超连接MOSFET与一个分裂门减少P区域,降低阻力. 这种新的金属氧化物半导体现场效应晶体管设计显著提高了优点的数字.
科学领域:
- 半导体设备物理学 半导体设备物理
- 材料科学是一种材料科学.
背景情况:
- 超连接 (SJ) 金属氧化物半导体场效应晶体管 (MOSFET) 对高压功率电子非常重要.
- 传统的SJ-MOSFET使用全碳化物 (SiC) P区域,这可能会限制性能改进.
研究的目的:
- 提出并从理论上验证一个新的4H-SiC深沟SJ-MOSFET结构与分裂门.
- 调查减少P区域对设备性能的影响,特别是特定的电阻和功效图 (FoM).
主要方法:
- 使用Sentaurus TCAD进行设备模拟.
- 一种新型深沟结构的理论验证,该结构包含P-poly-Si和电荷平衡的P-SiC区域.
- 对特定电阻和故障电压 (BV) 的分析,以确定优点数字 (FoM = BV ^ 2 / R).
主要成果:
- 拟议的分裂门4H-SiC深沟SJ-MOSFET结构通过P-poly-Si填充沟和P-SiC区域实现电荷平衡效应.
- 与传统的SJ-MOSFET相比,这种结构有效地减少了P区域.
- 具体的阻力下降,导致优点 (FoM) 的数字显著增加.
结论:
- 新型的4H-SiC深沟SJ-MOSFET带有分门,提供了一种有前途的方法来提高设备性能.
- 与C-MOS和传统SJ-MOSFET相比,拟议的结构显示了642%和39.65%更高的FoM.
- 这种设计代表了高压SiC MOSFET技术的重大进步.
相关概念视频
Characteristics of MOSFET
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Metal-oxide-semiconductor field-effect Transistors, or MOSFETs, play a critical role in electronic circuits. They are primarily utilized for amplifying and switching signals.
Various vital parameters influence their functionality, which is crucial for theory and electronics applications. First, channel dimensions, precisely length, and width, are pivotal. The size of these channels affects the transistor's ability to carry current and switching speeds; shorter channels typically enable...
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