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Updated: Jun 22, 2025

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从150毫米晶圆平面上使用离子液体进行电的工艺开发

Silvia Braun1, Maik Wiemer1, Stefan E Schulz1,2

  • 1Fraunhofer Institute for Electronic Nano Systems, 09126 Chemnitz, Germany.

Micromachines
|June 27, 2024
PubMed
概括

使用离子液 (1-乙基-3-甲基化与三) 在150毫米晶圆上进行电,不到15%的不均度. 在这种微系统技术应用中,种子层比黄金更有利.

关键词:
合金合金的使用情况.电极位置的电极位置电是电的方法之一.离子液体是有离子的液体.微电子技术的微电子微系统技术是微系统技术.图案涂装 图案涂装 涂装种子层是一种种子层.晶圆层面的晶圆水平.

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相关概念视频

Electrodeposition01:08

Electrodeposition

Electrodeposition is a technique used to separate an analyte from interferents by electrochemical processes. Here, the analyte is a metal ion that can be deposited on an electrode immersed in the sample solution. The electrochemical setup consists of an anode and a cathode. When an electric current is applied to the setup, oxidation occurs at the anode. At the cathode, which consists of a large metal surface, metal ions undergo reduction and deposit onto the surface.
Electrodeposition can...
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