基于石英结合角特征的蚀刻速率分析模型

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Updated: Jun 22, 2025

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Xinjia Zhao1, Chengbao Lv1, Shuanqiang Song1

  • 1Research Center for Applied Mechanics, School of Electro-Mechanical Engineering, Xidian University, No.2 South TaibaiRoad, Xi'an 710071, China.

Micromachines
|June 27, 2024
PubMed
概括

这项研究引入了一种新的方法,用于使用结合角度特征对石英晶体平面进行分类. 开发的蚀刻速率模型准确地预测了微观和宏观尺度上的晶体蚀刻,并通过实验数据验证.

关键词:
在MEMS MEMS中使用.结合角度的特征 结合角度的特征蚀刻速度 蚀刻速度石英石英是一种石英石英.

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