Wen Guo1, Qiuyue Yu1, Guoyan Wang1

  • 1Optical Ultra Precision Machining Technology Innovation Center, Beijing Institute of Space Mechanics and Electricity, Beijing 100094, China.

Micromachines
|June 27, 2024
PubMed
概括

多晶 (p-Si) 的纳米级加工对颗粒大小敏感. 较小的颗粒提高了材料去除效率,但增加了工件温度,影响了纳米切割过程中的地下损伤.

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