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Updated: Jun 22, 2025

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扫描电化学探头石刻法用于微光学元件的超精密加工,具有自由形曲面表面

Hantao Xu1, Lianhuan Han1, Jianan Huang1

  • 1Department of Mechanical and Electrical Engineering, Pen-Tung Sah Institute of Micro-Nano Science and Technology, State Key Laboratory of Physical Chemistry of Solid Surfaces (PCOSS), Fujian Science & Technology Innovation Laboratory for Energy Materials of China, Engineering Research Center of Electrochemical Technologies of Ministry of Education, Department of Chemistry, College of Chemistry and Chemical Engineering, Xiamen University, Xiamen, 361005, China.

Small (Weinheim an der Bergstrasse, Germany)
|June 28, 2024
PubMed
概括

扫描电化学探针光刻 (SECPL) 能够实现自由形微光学的超精密加工. 这种3D直接写作技术通过使用电化学腐蚀来克服材料挑战,以达到纳米尺度的精度.

关键词:
电化学加工 电化学加工 电化学加工自由形状的曲面曲面表面.微光学元件是一种微光学元件.扫描电化学探针显微镜 扫描电化学探针显微镜超精密机械加工 超精密机械加工

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