对于低挥发性液体前体输送泡泡器性能的表征
James E Maslar1, William A Kimes1, Brent A Sperling1
1Material Measurement Laboratory, National Institute of Standards and Technology 100 Bureau Drive, Gaithersburg, MD 20899, USA.
Journal of vacuum science & technology. A, Vacuum, surfaces, and films : an official journal of the American Vacuum Society
|July 10, 2024
概括
这项研究描述了一种用于在蒸汽沉积中输送前体 (CCTBA) 的泡泡器. 一个模型准确地预测了前体流速,这对于优化化学蒸汽沉积和原子层沉积过程至关重要.
科学领域:
- 材料科学 材料科学 材料科学
- 化学工程是化学工程的重要组成部分.
- 半导体制造业 半导体制造业
背景情况:
- 低挥发性的液体前体对于先进的沉积技术至关重要.
- 这些前体的准确输送对于工艺控制和片质量至关重要.
- 像CCTBA这样的前体被用于专门的半导体应用.
研究的目的:
- 描述用于输送前体 (CCTBA) 的泡泡系统的性能.
- 研究过程参数 (载体气体流量,系统压力,气泡温度) 对前体输送的影响.
- 开发和验证用于预测前体流速的模型.
主要方法:
- 在一个广泛的过程窗口中对泡泡机性能进行实验性表征.
- 使用定制的非散射红外气体分析仪测量CCTBA部分压力.
- 开发一个预测模型,包括头部空间部分压力和压力下降.
主要成果:
- 在各种条件下,CCTBA流速被准确地测量和建模.
- 假设恒定部分压力并包括压力下降的模型与实验数据有很好的一致性.
- 使用8月方程,CCTBA部分压力的温度依赖得到了成功的参数化.
结论:
- 泡泡系统在提供CCTBA时表现出可靠的性能.
- 开发的模型提供了对影响泡泡机性能的因素的更深入的了解.
- 这些发现适用于蒸汽沉积过程中的其他低挥发性液体前体.
关键词:
(tBu-乙) 迪科巴尔特赫萨卡博尼尔.这就是ALD.在CCTBA中,CCTBA可以在CCTBA中使用.在CVD中,CVD是非常重要的.在NDIR和NDIR中.原子层沉积的原子层沉积.这是一个泡泡泡泡的泡泡.化学蒸气沉积 化学蒸气沉积非分散式红外气体分析仪提供前体的前体交付.更多相关视频
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