双面结合过程使X射线平板探测器成为可能
Hui Zhang1,2, Shujie Tie3, Jiajiu Ye1
1Institute of Solid-State Physics, Hefei Institutes of Physical Science, Chinese Academy of Science, Hefei 230031, China.
ACS applied materials & interfaces
|July 12, 2024
概括
金属化物矿具有先进的X射线检测能力. 一种新的双面粘合方法使得大面积矿X射线探测器的制造成为可能,克服了整合的挑战.
科学领域:
- 材料科学 材料科学 材料科学
- 探测器物理学的物理
- 固态电子 固态电子
背景情况:
- 金属化物矿对X射线检测具有有前途的光电特性.
- 目前的挑战包括将矿集成到大面积的像素化传感器中,用于直接的X射线成像.
研究的目的:
- 为大面积矿X射线探测器阵列开发一个可扩展的制造战略.
- 为了证明三角化 (δ-CsPbI3) 在直接X射线检测中的性能.
主要方法:
- 采用了利用范德瓦尔斯力双面结合过程.
- 一种湿膜沉积技术将薄膜晶体管基板粘合到 δ-CsPbI3晶圆上.
- 独立的多晶 δ-CsPbI3晶圆的X射线检测性能的表征.
主要成果:
- 这种制造的设备可以为X射线检测提供区域阵列成像.
- δ-CsPbI3晶圆在50kVPX射线辐射下实现了3.46 nGyairs-1的超低检测极限.
- 信号输出保持稳定,信号电流漂移为3.5 × 10-5 pA cm-1 s-1 V-1 在234.9mGy累积剂量下.
结论:
- 拟议的双面结合策略使得大面积矿X射线探测器阵列的制造成为可能.
- 这种方法为工业生产基于矿的X射线平板探测器提供了一种新的方法.
- δ-CsPbI3显示出出色的稳定性和灵敏度,为下一代X射线成像铺平了道路.
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