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Jingwei Zhang1,2, Guangji Wang1,2, Zhimin Chai1,2

  • 1Department of Mechanical Engineering, Tsinghua University, Beijing 100084, China.

ACS nano
|July 13, 2024
PubMed
概括

一种新的表面能量定向组装 (SEDA) 工艺使金属氧化物电子产品的高分辨率图案设计成为可能. 这种以解决方案为基础的低成本方法可显著提高用于制造先进薄膜晶体管 (TFT) 和逻辑电路的模式保真度.

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