I Tezsevin1, J H Deijkers1, M J M Merkx1

  • 1Department of Applied Physics and Science Education, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands.

概括

随机序列吸附 (RSA) 在原子层沉积 (ALD) 中显著降低前体和,影响每周期增长 (GPC). 了解RSA对于优化ALD过程至关重要.

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