电离型聚4-基) 类型耐性聚合物的动力学,具有 tert-butoxycarbonyl 保护组
Kazumasa Okamoto1,2, Yusa Muroya3, Takahiro Kozawa3
1SANKEN (The Institute of Scientific and Industrial Research), Osaka University, Ibaraki, Osaka, 567-0047, Japan. kazu@sanken.osaka-u.ac.jp.
Scientific reports
|July 19, 2024
概括
化学放大电阻 (CARs) 对于纳米图案非常重要. 这项研究揭示了聚合物中 tert-butoxycarbonyl (t-BOC) 群相互作用如何影响基离子脱质,影响 lithography 的酸生成.
科学领域:
- 材料科学 材料科学 材料科学
- 聚合物化学 聚合物化学
- 摄影化学的使用.
背景情况:
- 纳米图案依赖于电阻材料中的辐射化学反应.
- 化学增强电阻 (CAR) 是石版的行业标准.
- 了解聚合物基离子去化是CAR中酸生成的关键.
研究的目的:
- 研究聚4-氨 (PHS) 抗聚合物的基离子动力学.
- 分析 tert-butoxycarbonyl (t-BOC) 保护组在 PHS 激素的作用.
- 阐明在t-BOC保护的PHS电阻中产生酸的机制.
主要方法:
- 电子脉冲放射解体实验. 电子脉冲放射解体实验.
- 酸性产量测量. 酸性产量测量.
- 量子化学计算 量子化学计算
主要成果:
- tert-butoxycarbonyl (t-BOC) 组的电子行为在聚合物离子中从电子捐赠转变为接受电子.
- 这种电子转移归因于聚合物链内的替代物相互作用.
- 基离子的不稳定,可能是通过降低的分子内电荷共振,与t-BOC覆盖的PHS聚合物中高的脱质效率相关.
结论:
- 保护组的电子性质和相互作用显著影响抗聚合物基质的电离子行为.
- 观察到的去质子化效率与激素离子不稳定有关.
- 结果为优化CAR用于先进的纳米图案 lithography提供了见解.
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