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通过稀少预先模拟的基板与自主响应的聚合物刷进行定向自组装.

Qingliang Song1, Jing Zhou2, Qingshu Dong1

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概括

块共聚合物的定向自组装 (DSA) 是由有图案的共聚合物刷指导的. 模拟显示这些刷子适应,使得无缺陷的图案对于先进的纳米技术应用至关重要.

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科学领域:

  • 材料科学 材料科学 材料科学
  • 聚合物化学 聚合物化学
  • 计算建模 计算建模

背景情况:

  • 块共聚合物的定向自组装 (DSA) 依赖于预先设计的共聚合物刷来指导.
  • 这些刷子形成了一个柔软的,可穿透的表面,能够进行局部隔离.

研究的目的:

  • 调查共聚合物刷子对DSA的自我反应行为的影响.
  • 为了确定无缺陷的模式形成的最佳参数.

主要方法:

  • 开发一种消散粒子动力学模型,采用预定模式的聚合物刷.
  • 在稀疏的刷图案上,大规模动态模拟圆柱形成的双块共聚合物融化DSA.

主要成果:

  • 标识垂直圆柱体六角形图案的关键参数窗口 (共聚物含量,薄膜厚度,点直径).
  • 在随机共聚合物刷中展示自我响应行为,扩大有效参数窗口.
  • 在模拟和实验中实现了多微米的无缺陷图案,用于四倍密度的乘法.

结论:

  • 计算机模拟为优化DSA参数提供了有效的指导.
  • 共聚合物刷的自我响应性增强了图案控制,并扩大了加工窗口.
  • 这种方法促进了DSA在纳米技术中的应用,用于创建有序结构.