对激光微加工用于APT和TEM样本制备的热效应的研究:一个建模和实验研究

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Anup Sharma¹, Shuo Zhang², Jing Fu²

¹Department of Mechanical Engineering, Indian Institute of Technology Bombay, Powai, Mumbai, 400076, India; Department of Mechanical and Aerospace Engineering, Monash University, Clayton 3168, Australia.

Ultramicroscopy

|July 23, 2024

概括

激光环状削使得高分辨率显微镜的样品可以快速准备. 这项研究通过确定最佳的激光参数来最大限度地减少热损伤,并保留微柱状微结构以进行先进的表征.

科学领域:

材料科学材料科学材料科学
机械工程机械工程
物理物理学物理

背景情况:

激光微加工对于高分辨率表征中的快速样品准备至关重要.
优化激光参数对于最大限度地减少受热影响区域 (HAZ) 和保持样本微观结构至关重要.
激光环状削需要仔细选择扫描直径,以保护内部微柱状区域免受热损伤.

研究的目的:

在激光环状削过程中评估HAZ大小.
为了确定最小的扫描直径,防止微柱体内部区域的热损伤.
建立最佳的激光参数,以准备用于原子探头断层扫描 (APT) 和传输电子显微镜 (TEM) 等技术的样本.

主要方法:

使用有限元法 (FEM) 计算模型来模拟激光加热.
使用皮秒脉冲激光机加工 (Al) 和 (Si) 微柱.
使用扫描电子显微镜 (SEM) 和电子反射散射衍射 (EBSD) 进行了表面和微结构分析.

主要成果:

模拟HAZ长度为大约6微米,大约12微米.
获得了的10微米和的26微米的微柱直径.
保存了微观结构误导 (<1°) 最小的中心区域:为6微米,为20-24微米,适合APT和TEM.

结论:

激光环形削,具有优化的参数,通过最大限度地减少HAZ有效地准备样本.
该研究确定了关键扫描直径,以保护高分辨率分析的微柱体完整性.
这种方法确保了微观结构的保存,使样品适合先进的表征技术.

关键词:

原子探测器断层扫描原子探测器断层扫描热带受影响地区激光微加工激光微加工样品的准备样品的准备热建模热建模热建模

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