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形晶片的高频振动,采用亚区域几何合方法

Zhenbo Sun¹, Zhe Wang¹, Zhen Li²

¹Zhejiang-Italy Joint Lab for Smart Materials and Advanced Structures, Ningbo University, Ningbo, 315211, China.

Scientific reports

|July 25, 2024

概括

这项研究引入了一种新的亚区域几何配合方法 (SGFM),用于分析形共振器. SGFM准确地预测频率特征,改善了共振器设计和制造效率.

科学领域:

材料科学材料科学材料科学
机械工程机械工程
物理物理学物理

背景情况:

形过程显著影响了共振器的频率稳定性,需要精确的设计方法.
了解形共振器的频率特征对于精确的工程至关重要.

研究的目的:

为了研究AT-cut斜共振器的高频振动特性.
开发和验证用于形共振器分析的新型亚区域几何配合方法 (SGFM).

主要方法:

利用了明德林的板理论和一个亚区域几何配套方法 (SGFM).
将石英晶片划分为三个区域,根据测量数据将每个区域配合多项式函数.
使用COMSOL的部分微分方程模块解决了管理方程.

主要成果:

SGFM的结果显示频率略高于全球配套方法,并且更接近测量数据.
增加形时间导致更高的频率和更显著的能量捕获效应.
SGFM在保持精度的同时,证明了对厚度剪切振动的计算效率有所提高.

结论:

SGFM是分析形晶体共振器的准确和有效方法.
拟议的方法为厚度剪切振动分析提供了更高的计算效率.
这项工作为形共振器设计和分析提供了一种新的几何配套方法.

关键词:

形的板块板块是没有的.强制振动是一种强制振动.几何适配配件几何适配件亚区域子区域亚区域子区域厚度剪切模式厚度剪切模式

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