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One-Step Approach to Fabricating Polydimethylsiloxane Microfluidic Channels of Different Geometric Sections by Sequential Wet Etching Processes
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一个新的模具工艺,用于聚甲基素微通道.

Lung-Jieh Yang1, Sameer Shaik1, Neethish Kumar Unnam1

  • 1Department of Mechanical and Electromechanical Engineering, Tamkang University, New Taipei 251301, Taiwan.

Micromachines
|July 27, 2024
PubMed
概括

使用皮秒激光切割的新模具制造方法为制造聚甲基 (PDMS) 微通道芯片提供了 SU-8 软光刻的替代方案. 这种无面具的工艺使得PDMS成型的片上能够有效地产生微通道图案.

关键词:
这是一个PDMS微通道.阳极结合 阳极结合 阳极结合激光切割是一种激光切割.

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科学领域:

  • 材料科学 材料科学 材料科学
  • 微流体学 微流体学
  • 纳米技术纳米技术

背景情况:

  • 传统的SU-8软光刻法用于聚甲基 (PDMS) 微通道制造具有局限性.
  • 开发用于微流体芯片制造的替代性,高效和无罩式方法对于推进微规模应用至关重要.

研究的目的:

  • 提出和演示PDMS微通道芯片的新模具制造工艺.
  • 为传统的SU-8软光刻提供替代品,利用皮秒激光技术.

主要方法:

  • 一个皮秒激光被用来模拟550微米厚的晶片,达到50微米的最小特征大小.
  • 激光后加工包括用氧化物 (KOH) 修剪边缘碎片,并用缓冲氧化蚀刻 (BOE) 清除场氧化物层.
  • 阳极粘合被用于将图案模芯固定在Pyrex 7740或Eagle XG玻璃基板上.

主要成果:

  • 成功制造了四英寸的晶片,具有微通道图案,作为PDMS模具核心.
  • 证明了后续PDMS成型和拆模的无面膜工艺的可行性.
  • 一个用于粒子分离的PDMS微通道芯片作为概念验证成功生产.

结论:

  • 拟议的模工艺,利用皮秒激光切割和阳极粘合,为PDMS微通道芯片制造提供了可行的无面膜替代方案.
  • 这种方法消除了对光刻光学设备的需求,尽管它需要外部激光切割服务.
  • 该技术适用于生产微流体设备,例如用于颗粒分离的设备.