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Updated: Jun 18, 2025

Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters
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Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters

Published on: February 4, 2018

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设计,制造和动态分析由双圆形曲线束支持的MEMS环共振器

Ahmad Rahbar Ranji1, Gnanesh Nagesh1, Fangyan Sun1

  • 1Department of Mechanical, Automotive and Material Engineering, University of Windsor, Windsor, ON N9B 3P4, Canada.

Sensors (Basel, Switzerland)
|July 27, 2024
PubMed
概括

本研究详细介绍了微电机系统 (MEMS) 环共振器设计及其动态行为. 一个分析模型准确地预测了共振器的性能,通过实验制造和测试来验证.

关键词:
对于女性来说,FEM就是女性.在MEMS MEMS中使用.动态分析 动态分析静电力是一种静电力.拉入电压的拉入电压.环形共振器的共振器是一个环形共振器.

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