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为紫外线,光学和近红外线微波动力感应探测器优化Ti / TiN多层.

Gerhard Ulbricht1,2,3, Mario De Lucia1,2, Jack Piercy1,2

  • 1Dublin Institute for Advanced Studies, 31 Fitzwilliam Place, Dublin 02, Ireland.

Journal of low temperature physics
|July 29, 2024
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概括

研究人员正在开发使用/化 (Ti/TiN) 薄膜的先进微波动力感应探测器 (MKID),以改进紫外线,可见光和近红外光子检测. 虽然最初的原型很有前途,但需要进一步优化以提高灵敏度.

关键词:
探测器的制造 检测器的制造动力感应探测器 动力感应探测器在UVOIR的MKID中.

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科学领域:

  • 超导装置是一种超导装置.
  • 光子检测技术的技术
  • 用于探测器的材料科学

背景情况:

  • 微波运动感应探测器 (MKID) 提供了诸如单光子计数和高时间分辨率等优势.
  • 由于材料限制和操作温度要求,制造高质量的MKID具有挑战性.
  • /化 (Ti/TiN) 多层材料为各种MKID应用提供了有希望的替代品.

研究的目的:

  • 为了适应近距离合的超导Ti/TiN薄膜用于光子计数MKID.
  • 调查Ti/TiN多层制造的UV,可见和近IR检测.
  • 解决MKID性能方面的挑战,并探索潜在的改进.

主要方法:

  • 制造交替的Ti/TiN薄膜堆.
  • 研究制造温度对探测器性能的影响.
  • 描述探测器灵敏度和光子能量分辨能力.

主要成果:

  • Ti/TiN多层表现出可控制的临界温度 (Tc) 和在大型晶圆上具有良好的均性.
  • 首批原型实现了高达3.1的光子能量分辨能力.
  • 最初的原型被发现没有足够的灵敏度,过度的相位噪声归因于表面氧化.

结论:

  • /多层是制造MKID的可行和可控制的材料系统.
  • 需要进一步优化以克服灵敏度限制和减轻噪声源.
  • 目前正在进行的研究重点是改善探测器性能,以便在UV,可见光和近IR光子检测中未来应用.