非分散的紫外线可见气体分析仪,用于在蒸汽沉积过程中监测化和氧化前体
James E Maslar1, Berc Kalanyan1
1Material Measurement Laboratory, National Institute of Standards and Technology (NIST), Gaithersburg, Maryland, USA.
Applied spectroscopy
|August 2, 2024
概括
非分散的紫外线可见气体分析仪有效监测微电子制造中的前体. 测试了不同的带通波器,揭示了针对特定化合物的最佳灵敏度和选择性.
科学领域:
- 材料科学 材料科学 材料科学
- 化学工程是化学工程的重要组成部分.
- 分析化学 分析化学
背景情况:
- 监测前体的交付对于精确的微电子制造至关重要.
- 含有的前体在先进的半导体工艺中至关重要.
研究的目的:
- 评估用于监测前体的非分散紫外线可见气体分析仪设计.
- 为了比较不同带宽波器的选择性和灵敏性的性能.
主要方法:
- 测试了三种非分散紫外线可见气体分析仪设计,带有不同的带通波器.
- 测量了五化,氧四化和二氧化的部分压力.
- 模拟分析器响应使用不同的波器和分析剂组合的模型.
主要成果:
- 确定五化的最小可检测密度为1 × 10−4 mol m−3.
- 对具有不同过器的分析仪对潜在干扰物的敏感性和选择性进行了评估.
- 在真实微电子沉积工艺线上验证分析仪性能.
结论:
- 非分散的紫外线可见气体分析仪适用于对前体的实时监测.
- 带通波器的选择对特定的化合物的分析仪性能产生重大影响.
- 该研究为选择前体监测最佳分析仪配置提供了一个框架.
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