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Updated: Jun 17, 2025

Sample Preparation and Experimental Design for In Situ Multi-Beam Transmission Electron Microscopy Irradiation Experiments
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开发和评估费里特核诱导合等离子电波离子源用于半导体应用中的高电流离子植入器

Jong-Jin Hwang1, Hyo-Jun Sim1, Seung-Jae Moon1

  • 1Department of Mechanical Convergence Engineering, Hanyang University, Seoul 04763, Republic of Korea.

Sensors (Basel, Switzerland)
|August 10, 2024
PubMed
概括

这项研究开发了一种新的铁核电感应合等离子 (ICP) 射频 (RF) 离子源,以延长离子植入器的寿命. 这种新型的射频离子源表现出稳定的运行和更好的性能,即使在具有挑战性的BF3气体.

关键词:
射频射频离子源是一种RF离子源.费里特核是感应合的等离子体射频离子源.植入器离子源是植入器的离子源.离子源的寿命改善

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