光发光光谱学为微芯片的功能性质提供了新的了解
Hanna Bandarenka1, Andrey Kuzmin1, Alexander Baev1
1Institute for Lasers, Photonics and Biophotonics, State University of New York at Buffalo, Buffalo, New York 14260 ,United States.
ACS omega
|August 12, 2024
概括
光发光光谱现在可以通过用新的染料感知电场并绘制温度变化图来测试微芯片. 这使得集成电路在组件和系统层面的先进测试成为可能.
科学领域:
- 材料科学 材料科学 材料科学
- 半导体物理 半导体物理
- 频谱学是一种光谱学.
背景情况:
- 单晶是微电子领域的领先半导体.
- 的低光发光辐射被集成电路层屏蔽.
- 微芯片的先进测试需要克服这些局限性.
研究的目的:
- 开发用于微芯片评估中的光发光谱学的新方法.
- 为了证明电位测染料在可操作的芯片中用于电场传感的使用.
- 为了研究光发光对局部温度变化的敏感性.
主要方法:
- 使用光发光谱学探测局部相互作用和动态.
- 应用电位计染料用于芯片的电场传感.
- 测量晶体的语音辅助光发光,以检测温度变化.
主要成果:
- 展示了电位计染料的新型应用,用于感知芯片中的电场.
- 展示了光发光对局部温度 (27-64°C) 的高灵敏度.
- 启用了热和电场分布的传感和映射.
结论:
- 光发光谱是评估半导体材料和微芯片的通用工具.
- 新的概念方法可以克服测试微芯片的局限性.
- 基于光发光的热和电场映射有助于精确测试集成电路.
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