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激光沉积金属化物佩洛夫斯基特

Tatiana Soto-Montero¹, Monica Morales-Masis¹

¹MESA+ Institute for Nanotechnology, University of Twente, Enschede 7500 AE, The Netherlands.

ACS energy letters

|August 15, 2024

概括

物理蒸汽沉积 (PVD) 方法,如脉冲激光沉积,为生长化烯矿薄膜提供了一个有希望的干燥,合规和多层方法,克服了前体挥发性的挑战.

科学领域:

材料科学材料科学材料科学
化学工程是化学工程的重要组成部分.
物理物理学物理

背景情况:

基于真空的沉积是半导体薄膜的标准.
由于前体挥发性挑战,化矿的蒸汽阶段增长尚未得到充分探索.
溶液处理对于化胺矿更为常见.

研究的目的:

审查最近基于激光的化物矿沉积的进展.
讨论这些物理蒸汽沉积方法的优点和挑战.
激励用于混合材料的PVD进一步开发.

主要方法:

脉冲激光沉积 (PLD) 使用激光能量从单一源目标中喷射材料.
热共蒸发用于每个前体的独立控制来源.
专注于基于激光的沉积技术的化物矿薄膜.

主要成果:

PLD为沉积复杂和混合薄膜提供了高度的多功能性.
PLD克服了与明显的前体波动性相关的挑战.
基于激光的方法使干燥,形状和多层沉积成为可能.

结论:

基于激光的物理蒸汽沉积是一种可行的和多功能技术,用于化矿矿薄膜.
进一步开发PVD方法对于混合材料至关重要.
这些技术特别适用于需要精确干燥沉积的应用.

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