不确定性传播从探头间距到富里埃三探头直度测量
Pu Huang1, Jin Xie1, Han Haitjema2
1School of Mechanical and Automobile Engineering, South China University of Technology, Guangzhou 510640, PR China.
ISA transactions
|August 16, 2024
概括
探头间距的不确定性显著影响富里埃三探头 (F3P) 直度测量. 这项研究揭示了不确定性传播定律,并引入了一种混合方法,以提高超精密制造的测量精度.
科学领域:
- 计量学和测量科学 计量学和测量科学
- 精密工程 精密工程是指精密的工程.
- 制造业 制造技术 制造技术
背景情况:
- 精确的直度形状测量对于超精密元件制造至关重要.
- 富里埃三探头 (F3P) 方法提供机器上评估,减轻滑动桌错误运动.
- 探测器间距的不确定性是影响F3P测量精度的关键因素,但尚未研究.
研究的目的:
- 在F3P直度测量中彻底调查探头间距不确定性的传播.
- 分析探头间距偏差影响测量准确性的机制.
- 开发和验证一种方法来减少F3P测量的不确定性传播.
主要方法:
- 分析探头间距偏差对工件形状评估的影响.
- 使用拉普拉斯变换在域中对探头间距不确定性传播定律的代数推理.
- 蒙特卡洛模拟验证衍生不确定性传播定律.
- 开发一种混合方法,涉及多次F3P测量,不同的探头间距和最佳波估计.
主要成果:
- 该研究阐明了F3P测量中探针间距不确定性传播的详细机制.
- 在域中,一个新的不确定性传播定律被代数推导出来,并通过模拟得到确认.
- 建议采用混合测量策略,并通过模拟和实验数据进行验证.
结论:
- 探头间距的不确定性是F3P直度测量中的重要错误来源,需要仔细管理.
- 衍生出的域不确定性传播定律为错误分析提供了理论基础.
- 拟议的混合方法有效地减少了不确定性传播,从而为超精确的应用程序提供更准确的直度配置测量.
相关概念视频
00:59Propagation of Uncertainty from Random Error
658
An experiment often consists of more than a single step. In this case, measurements at each step give rise to uncertainty. Because the measurements occur in successive steps, the uncertainty in one step necessarily contributes to that in the subsequent step. As we perform statistical analysis on these types of experiments, we must learn to account for the propagation of uncertainty from one step to the next. The propagation of uncertainty depends on the type of arithmetic operation performed on...
658
03:37Uncertainty in Measurement: Accuracy and Precision
73.6K
Scientists typically make repeated measurements of a quantity to ensure the quality of their findings and to evaluate both the precision and the accuracy of their results. Measurements are said to be precise if they yield very similar results when repeated in the same manner. A measurement is considered accurate if it yields a result that is very close to the true or the accepted value. Precise values agree with each other; accurate values agree with a true value.
73.6K