从源到样本的SEM柱的波光学建模
Surya Kamal1,2, Yongjian Zhou2, Zizhou Gong2
1NanoImaging Lab, Chester F. Carlson Center for Imaging Science, Rochester Institute of Technology, 54 Lomb Memorial Drive, Rochester, NY 14623, USA.
概括
本研究介绍了一种全面的波光模型,用于扫描电子显微镜 (SEM) 列,准确模拟电子束传播,克服精确探头形成的别名问题.
科学领域:
- 物理 物理学 物理
- 材料科学 材料科学 材料科学
- 电子显微镜电子显微镜
背景情况:
- 传统的扫描电子显微镜 (SEM) 探头形成模型往往简化了光学系统.
- 现有的模型依赖于点分散函数或里埃变换,限制了准确性.
- 缺少整个SEM柱的完整波光学模型.
研究的目的:
- 为整个SEM列开发第一个完整的波光学模型.
- 为了应对平面对平面电子束传播和别名化方面的挑战.
- 准确模拟从源到样本的电子束分布.
主要方法:
- 开发了一种使用平面对平面电子束波函数传播的一般波光传播方法.
- 采用两步传播器来模拟整个SEM柱的光束分布.
- 通过仔细的传播器选择和组合,克服了由采样限制引起的异形化问题.
主要成果:
- 通过成功克服别名化,实现了适当的探针宽度.
- 证明了从虚拟源到样本平面的电子束分布的准确建模.
- 验证模拟结果与探头形成的几何理论相对应.
结论:
- 开发的波形光学模型提供了更准确的SEM探头形成的表示.
- 组合镜头偏差 (冷凝器和镜头) 需要一个完整的列模型来准确表示.
- 新的应用包括设计光束造型实验和研究部分连贯效应.
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