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基于MEMS的元发射器具有主动调节的辐射功率特征

Kunye Li¹, Yuhao Liang^2,3, Yu-Sheng Lin^4,5

¹School of Electronics and Information Technology, Sun Yat-Sen University, Guangzhou, 510006, China.

|August 24, 2024

概括

我们使用微电机系统 (MEMS) 技术开发了一个可调节的元发射器,用于长波红外 (LWIR) 应用. 该设备提供可控制的热辐射,非常适合气体传感和红外光谱学.

科学领域:

超材料和纳米光子学
微电机系统 (MEMS) 是指微电机系统.

背景情况:

超材料具有独特的光物质相互作用特性.
可调节的红外源对于各种传感和分析应用至关重要.

研究的目的:

提出和演示一种基于超发射器的新型微电机系统 (MEMS).
为了在长波红外 (LWIR) 频谱中实现可调节的完美吸收和热辐射.

主要方法:

使用金 (Au) 和二氧化 (SiO2) 双层支柱制造一个元发射元单元.
使用由差异热膨胀系数 (TEC) 驱动的电热启动机制进行调整.
在温度范围内描述吸收光谱和热辐射特性.

主要成果:

MEMS元发射器在LWIR范围内 (8.9011.90μm) 具有可调节的完美吸收.
热辐射的峰值波长可以通过将温度从293K提高到1290K,从9.52μm调整到10.48μm.
证明随着温度的增加,悬臂曲高度的线性下降.

结论:

拟议的基于MEMS的元发射器是一个可行的LWIR光源.
潜在的应用包括气体传感,红外光谱和医疗保健.

关键词:

红外发射器的发射器是红外发射器.在MEMS MEMS中使用.超材料是一种超材料.地表表层的表层.热辐射是一种热辐射.可调节的波器过器

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