对于螺旋式慢波结构的THz辐射的集成合器
Shiva Hajitabarmarznaki1, Shelley A Scott2, Marcos Martinez-Argudo1
1Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Madison, Wisconsin 53706, United States.
ACS omega
|August 26, 2024
概括
研究人员开发了一种集成设备,用于表征晶圆上的慢波结构. 这一创新可能会导致紧的,具有成本效益的太赫兹移动波管放大器.
科学领域:
- 特拉赫兹 (THz) 技术的使用.
- 微波工程 微波工程 微波工程
- 半导体设备制造业 半导体设备制造业
背景情况:
- 描述慢波结构 (SWS) 通常需要切割和包装单个设备,增加成本和复杂性.
- 旅行波管 (TWT) 放大器对于高频应用至关重要,但通常面临尺寸和成本的限制.
- 晶圆级测试为设备开发和表征提供了更有效和更经济的方法.
研究的目的:
- 设计和演示一个集成的装置,用于SWS的晶圆上表征.
- 探索垂直集成天线和SWS用于THz TWT放大器的潜力.
- 为了实现高效的光束波相互作用研究,而无需单独的设备包装.
主要方法:
- 设计了一种集成装置,将同轴喇天线与自组装的螺旋慢波结构合起来.
- 在用于设备制造的在绝缘体 (SOI) 晶圆上使用了v槽.
- 专注于使冷参数和光束-波相互作用的晶圆层次表征成为可能.
主要成果:
- 成功设计了一种新的集成设备架构.
- 设计方便在晶圆上进行表征,可能减少制造步骤.
- 综合结构显示出开发紧和低成本THz TWT放大器的前景.
结论:
- 开发的集成装置使得缓波结构的晶圆层级特征能够高效地进行表征.
- 这种方法为紧且具有成本效益的太赫兹移动波管放大器铺平了道路.
- 天线和SWS的垂直集成是未来THz设备开发的有希望的策略.
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