连续表面光场调制器的设计和制造,用于角光谱离散性补偿.
Min Xiao1,2, Axiu Cao2, Cheng Xu1,2
1School of Physics, University of Electronic Science and Technology of China, Chengdu 610054, China.
Micromachines
|August 29, 2024
概括
研究人员开发了随机的微圆柱状镜头阵列,通过补偿角光谱的离散性,实现精确的角光谱调制和高斯照明场来改善光学机器的光均性.
科学领域:
- 光学和光子学 在光学和光子学.
- 半导体制造技术技术 半导体制造
- 微光学是一种微光学.
背景情况:
- 光同质化元件对于在光刻照明系统中均的能量分布至关重要.
- 在同质化器中,角光谱的离散性显著降低了光的一致性.
研究的目的:
- 设计和制造一种新的角光谱调制器,以克服角光谱的离散性.
- 为了实现统一的高斯光学场,以提高 lithography 的性能.
主要方法:
- 制造随机的微圆柱状镜头阵列,可调节距离和曲率半径.
- 使用面具移动技术进行调制器制造.
- 通过实验对表面形状和光学性能进行表征.
主要成果:
- 成功生成了小角度高斯光学场,弥补了角光谱的离散性.
- 通过调整镜头参数来实现精确的角光谱调制.
- 光学测试显示,角度误差低于0.02°,平衡度高于0.5%.
结论:
- 开发的随机微圆柱状镜头阵列有效地解决了在光刻照明中的角光谱离散性.
- 制造的角光谱调制器为实现高光均性提供了可行的解决方案.
- 这项技术可以精确控制角光谱,这对于先进的光刻应用至关重要.
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