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Updated: Jul 15, 2026

Magnetic Tweezers for the Measurement of Twist and Torque
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用于使用道磁阻传感器的MEMS超声波电机的高分辨率旋转测量系统

Jiangbo He1, Qiuyue Feng1, Yu Chen2,3

  • 1School of Mechanical Engineering, Xihua University, Chengdu 610039, China.

Micromachines
|August 29, 2024
PubMed
概括

这项研究引入了一种新的高分辨率旋转测量系统,用于使用道磁阻 (TMR) 传感器的MEMS超声波电机. 该系统实现了超过0.1°的分辨率,证明了微型电机的精确旋转检测.

关键词:
在MEMS MEMS中使用.旋转测量仪 - 旋转测量仪开通道的磁阻力超声波电机的超声波发动机.

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