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一个新的失控行动计划 (OCAP) 优化半导体制造的晶圆探测过程的效率和质量

Woonyoung Yeo1, Yung-Chia Chang1, Liang-Ching Chen2

  • 1Department of Industrial Engineering and Management, National Yang Ming Chiao Tung University, Hsinchu 300, Taiwan.

Sensors (Basel, Switzerland)
|August 29, 2024
PubMed
概括

对于半导体晶圆探测,新的失控行动计划 (OCAP) 减少了每周24小时以上的停机时间,并提高了生产. 这种增强的OCAP可以提高制造过程的效率和可靠性.

关键词:
无法控制的行动计划 (OCAP)设备的整体有效性 (OEE)探测器收益率测试 测试半导体制造业 半导体制造业晶圆探测过程 晶圆探测过程

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