新型水探测器用于高频聚焦传感器,应用于扫描声学显微镜系统:模拟和实验调查
Van Hiep Pham1,2, Le Hai Tran3, Jaeyeop Choi4
1Faculty of Mechanical Engineering and Mechatronics, PHENIKAA University, Yen Nghia, Ha Dong, Hanoi 12116, Vietnam.
Sensors (Basel, Switzerland)
|August 29, 2024
概括
一个新的水流探测器通过消除样品浸泡来简化扫描声学显微镜 (SAM). 这一创新减少了检查时间,并防止了在非破坏性材料评估中的样品污染.
科学领域:
- 材料科学 材料科学 材料科学
- 工程 工程师 工程师 工程师
- 非破坏性测试是指非破坏性测试.
背景情况:
- 扫描声学显微镜 (SAM) 是工业和科学中材料质量评估的关键非破坏性技术.
- 传统的SAM需要将样品浸入水中,需要复杂的机器人系统并增加检查时间.
- 样品沉浸也可能导致长时间扫描过程中的污染.
研究的目的:
- 为SAM系统开发一种新的水探测器,特别是水流.
- 通过基于水流的方法来简化SAM系统设计和减少检查时间.
- 为了防止与水浸沉相关的样品污染问题.
主要方法:
- 根据传感器焦距计算设计了一个水流探测器.
- 模拟水流的内部流动特征.
- 设计了水流的原型,并将其与传统的 (TSAM-400) 和快速的 (W-FSAM) SAM系统集成.
主要成果:
- 水流探测器成功设计和模拟.
- 对SAM系统的原型设计和应用证明了对各种材料的成功成像.
- 实现了碳纤维增强聚合物,印刷电路板和6英寸晶圆的有效成像.
结论:
- 开发的水流探测器提供了一种简化和高效的替代方案,可以将样品浸入SAM.
- 这种新的方法减少了检查时间,并避免了潜在的样品污染.
- 该设计方法得到了验证,并适用于现有的SAM系统,以提高性能.
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